Etchant
Etchant is a key material in the wet etching process of chips. With hydrofluoric acid, nitric acid and other substances as the main components, it achieves precision etching through redox reactions and is widely used in chip manufacturing.
- ? 3D NAND Flash Silicon Nitride Etching Process
- ? 12-inch Process
- ? Supporting Equipment: TEL and DNS
- ? Exhibits outstanding etching selectivity with a selectivity ratio exceeding 2000:1, enabling high-precision etching between different materials, effectively avoiding damage to non-target areas and ensuring precise control.
- ? Demonstrates excellent protection performance for Poly and OX, preventing surface damage.
- ? Features an extremely low level of metal ion contamination, significantly reducing the risk of impurity introduction during etching and meeting the stringent requirements of advanced semiconductor manufacturing.
